|
無塵室的應用,大致可分為二類,即工業用無塵室(Industrial Clean Room)簡稱ICR,和生化及醫學用無塵室(Biological Clean Room)簡稱BCR。
在工業用無塵室其清淨度規格方面,有美國聯邦規格標準FS209E(US Federal Standard 209E)及日本國家標準 JIS B9920等多種參考規範.在生化.醫學用無菌室其要求規格有美國航空太空總署(NASA)規範(NHB5340.2)最為普遍。
無塵室的設計通常依照使用需求情況加以檢討再決定採用何種規範作為基準。
以下為常用設計規格摘要表。
FS 209E規格表
|
工業用潔淨室
清淨度
|
微塵粒子 粒徑
|
| 0.1μm |
0.2μm |
0.3μm |
0.5μm |
5μm |
| 累積粒子數 |
累積粒子數 |
累積粒子數 |
累積粒子數 |
累積粒子數 |
| SI |
Class |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
| M1 |
|
350 |
9.91 |
75.7 |
2.14 |
30.9 |
0.875 |
10.0 |
0.283 |
--- |
--- |
| M1.5 |
1 |
1,240 |
35.0 |
265 |
7.50 |
106 |
3.00 |
35.3 |
1.00 |
--- |
--- |
| M2 |
|
3,500 |
99.1 |
757 |
21.4 |
309 |
8.75 |
100 |
2.83 |
--- |
--- |
| M2.5 |
10 |
12,400 |
350 |
2,650 |
75.0 |
1,060 |
30.0 |
353 |
10.0 |
--- |
--- |
| M3 |
|
35,000 |
991 |
7,570 |
214 |
3,090 |
87.5 |
1,000 |
28.3 |
--- |
--- |
| M3.5 |
100 |
--- |
--- |
26,500 |
750 |
10,600 |
300 |
3,530 |
100 |
--- |
--- |
| M4 |
|
--- |
--- |
75,700 |
2,140 |
30,900 |
875 |
10,000 |
283 |
--- |
--- |
| M4.5 |
1,000 |
--- |
--- |
--- |
--- |
--- |
--- |
35,300 |
1,000 |
247 |
7.00 |
| M5 |
|
--- |
--- |
--- |
--- |
--- |
--- |
100,000 |
2,830 |
618 |
17.5 |
| M5.5 |
10,000 |
--- |
--- |
--- |
--- |
--- |
--- |
353,000 |
10,000 |
2,470 |
70.0 |
| M6 |
|
--- |
--- |
--- |
--- |
--- |
--- |
1,000,000 |
28,300 |
6,180 |
175 |
| M6.5 |
100,000 |
--- |
--- |
--- |
--- |
--- |
--- |
3,530,000 |
100,000 |
24,700 |
700 |
| M7 |
|
--- |
--- |
--- |
--- |
--- |
--- |
10,000,000 |
283,000 |
61,800 |
1,750 |
ISO/TC209[ISO 14644-1]
Cleanliness Classes in Cubic Meters and Cubic Feet
| |
|
0.1μm
/m3
|
0.1μm
/ft3
|
0.2μm
/m3
|
0.2μm
/ft3
|
0.3μm
/m3
|
0.3μm
/ft3
|
0.5μm
/m3
|
0.5μm
/ft3
|
1.0μm
/m3
|
1.0μm
/ft3
|
5.0μm
/m3
|
5.0μm
/ft3
|
ISO
ClASS 1 |
|
10 |
0.285 |
2 |
0.057 |
|
|
|
|
|
|
|
|
ISO
ClASS 2 |
|
100 |
2.85 |
24 |
0.685 |
10 |
0.285 |
4 |
0.114 |
|
|
|
|
ISO
ClASS 3 |
209E
Class 1 |
1000 |
28.5 |
237 |
6.77 |
102 |
2.91 |
35 |
1 |
8 |
0.228 |
|
|
ISO
ClASS 4 |
209E
Class 10 |
10000 |
285.7 |
2370 |
67.7 |
1020 |
29.1 |
352 |
10 |
83 |
2.37 |
|
|
ISO
ClASS 5 |
209E
Class 100 |
100000 |
2857 |
23700 |
677 |
10200 |
291 |
3520 |
103 |
832 |
23.7 |
29 |
0.828 |
ISO
ClASS 6 |
209E
Class 1 000 |
1000000 |
28570 |
237000 |
6771 |
102000 |
2914 |
35200 |
1005 |
8320 |
237.7 |
293 |
8.37 |
ISO
ClASS 7 |
209E
Class
10 000 |
|
|
|
|
|
|
352000 |
10057 |
83200 |
2377 |
2930 |
83.7 |
ISO
ClASS 8 |
209E
Class
100 000 |
|
|
|
|
|
|
3520000 |
100571 |
832000 |
23771 |
29300 |
837 |
ISO
ClASS 9 |
209E
Class
1000 000 |
|
|
|
|
|
|
35200000 |
1005714 |
8320000 |
237714 |
293000 |
8371 |
|
