|
Basically, applications for clean rooms are categorized into two types, i.e. Industrial Clean Room (ICR) and Biological Clean Room (BCR).
There are various reference standards such as US Federal Standard 209E (FS 209E) and Japanese National Standards JIS B9920 for Industrial Clean Room. As for Biological Clean Room, NASA regulations NHB5340.2 are the most popular specifications.
Basically, actual use conditions for clean room design shall be first evaluated before baseline decision to be made on appropriate regulations.
Summary for design specifications is as followed.
FS 209E Specifications
|
ICR Cleanliness
|
Diameter for Airborne Particle
|
| 0.1μm |
0.2μm |
0.3μm |
0.5μm |
5μm |
| Accumulated Particle No. |
Accumulated Particle No. |
Accumulated Particle No. |
Accumulated Particle No. |
Accumulated Particle No. |
| SI |
Class |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
(m3) |
(ft3) |
| M1 |
|
350 |
9.91 |
75.7 |
2.14 |
30.9 |
0.875 |
10.0 |
0.283 |
--- |
--- |
| M1.5 |
1 |
1,240 |
35.0 |
265 |
7.50 |
106 |
3.00 |
35.3 |
1.00 |
--- |
--- |
| M2 |
|
3,500 |
99.1 |
757 |
21.4 |
309 |
8.75 |
100 |
2.83 |
--- |
--- |
| M2.5 |
10 |
12,400 |
350 |
2,650 |
75.0 |
1,060 |
30.0 |
353 |
10.0 |
--- |
--- |
| M3 |
|
35,000 |
991 |
7,570 |
214 |
3,090 |
87.5 |
1,000 |
28.3 |
--- |
--- |
| M3.5 |
100 |
--- |
--- |
26,500 |
750 |
10,600 |
300 |
3,530 |
100 |
--- |
--- |
| M4 |
|
--- |
--- |
75,700 |
2,140 |
30,900 |
875 |
10,000 |
283 |
--- |
--- |
| M4.5 |
1,000 |
--- |
--- |
--- |
--- |
--- |
--- |
35,300 |
1,000 |
247 |
7.00 |
| M5 |
|
--- |
--- |
--- |
--- |
--- |
--- |
100,000 |
2,830 |
618 |
17.5 |
| M5.5 |
10,000 |
--- |
--- |
--- |
--- |
--- |
--- |
353,000 |
10,000 |
2,470 |
70.0 |
| M6 |
|
--- |
--- |
--- |
--- |
--- |
--- |
1,000,000 |
28,300 |
6,180 |
175 |
| M6.5 |
100,000 |
--- |
--- |
--- |
--- |
--- |
--- |
3,530,000 |
100,000 |
24,700 |
700 |
| M7 |
|
--- |
--- |
--- |
--- |
--- |
--- |
10,000,000 |
283,000 |
61,800 |
1,750 |
ISO/TC209[ISO 14644-1]
Cleanliness Classes in Cubic Meters and Cubic Feet
| |
|
0.1μm
/m3
|
0.1μm
/ft3
|
0.2μm
/m3
|
0.2μm
/ft3
|
0.3μm
/m3
|
0.3μm
/ft3
|
0.5μm
/m3
|
0.5μm
/ft3
|
1.0μm
/m3
|
1.0μm
/ft3
|
5.0μm
/m3
|
5.0μm
/ft3
|
ISO
ClASS 1 |
|
10 |
0.285 |
2 |
0.057 |
|
|
|
|
|
|
|
|
ISO
ClASS 2 |
|
100 |
2.85 |
24 |
0.685 |
10 |
0.285 |
4 |
0.114 |
|
|
|
|
ISO
ClASS 3 |
209E
Class 1 |
1000 |
28.5 |
237 |
6.77 |
102 |
2.91 |
35 |
1 |
8 |
0.228 |
|
|
ISO
ClASS 4 |
209E
Class 10 |
10000 |
285.7 |
2370 |
67.7 |
1020 |
29.1 |
352 |
10 |
83 |
2.37 |
|
|
ISO
ClASS 5 |
209E
Class 100 |
100000 |
2857 |
23700 |
677 |
10200 |
291 |
3520 |
103 |
832 |
23.7 |
29 |
0.828 |
ISO
ClASS 6 |
209E
Class 1 000 |
1000000 |
28570 |
237000 |
6771 |
102000 |
2914 |
35200 |
1005 |
8320 |
237.7 |
293 |
8.37 |
ISO
ClASS 7 |
209E
Class
10 000 |
|
|
|
|
|
|
352000 |
10057 |
83200 |
2377 |
2930 |
83.7 |
ISO
ClASS 8 |
209E
Class
100 000 |
|
|
|
|
|
|
3520000 |
100571 |
832000 |
23771 |
29300 |
837 |
ISO
ClASS 9 |
209E
Class
1000 000 |
|
|
|
|
|
|
35200000 |
1005714 |
8320000 |
237714 |
293000 |
8371 |
|
