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Specifications and Cleanliness for Clean Rooms

Basically, applications for clean rooms are categorized into two types, i.e. Industrial Clean Room (ICR) and Biological Clean Room (BCR).

 

There are various reference standards such as US Federal Standard 209E (FS 209E) and Japanese National Standards JIS B9920 for Industrial Clean Room. As for Biological Clean Room, NASA regulations NHB5340.2 are the most popular specifications.

 

Basically, actual use conditions for clean room design shall be first evaluated before baseline decision to be made on appropriate regulations.

 

Summary for design specifications is as followed.

 
FS 209E Specifications

ICR Cleanliness

Diameter for Airborne Particle

0.1μm 0.2μm 0.3μm 0.5μm 5μm
Accumulated Particle No. Accumulated Particle No. Accumulated Particle No. Accumulated Particle No. Accumulated Particle No.
SI Class (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3)
M1   350 9.91 75.7 2.14 30.9 0.875 10.0 0.283 --- ---
M1.5 1 1,240 35.0 265 7.50 106 3.00 35.3 1.00 --- ---
M2   3,500 99.1 757 21.4 309 8.75 100 2.83 --- ---
M2.5 10 12,400 350 2,650 75.0 1,060 30.0 353 10.0 --- ---
M3   35,000 991 7,570 214 3,090 87.5 1,000 28.3 --- ---
M3.5 100 --- --- 26,500 750 10,600 300 3,530 100 --- ---
M4   --- --- 75,700 2,140 30,900 875 10,000 283 --- ---
M4.5 1,000 --- --- --- --- --- --- 35,300 1,000 247 7.00
M5   --- --- --- --- --- --- 100,000 2,830 618 17.5
M5.5 10,000 --- --- --- --- --- --- 353,000 10,000 2,470 70.0
M6   --- --- --- --- --- --- 1,000,000 28,300 6,180 175
M6.5 100,000 --- --- --- --- --- --- 3,530,000 100,000 24,700 700
M7   --- --- --- --- --- --- 10,000,000 283,000 61,800 1,750
ISO/TC209[ISO 14644-1]

Cleanliness Classes in Cubic Meters and Cubic Feet

   

0.1μm
/m3

0.1μm
/ft3

0.2μm
/m3

0.2μm
/ft3

0.3μm
/m3

0.3μm
/ft3

0.5μm
/m3

0.5μm
/ft3

1.0μm
/m3

1.0μm
/ft3

5.0μm
/m3

5.0μm
/ft3

ISO
ClASS 1
  10 0.285 2 0.057                
ISO
ClASS 2
  100 2.85 24 0.685 10 0.285 4 0.114        
ISO
ClASS 3
209E
Class 1
1000 28.5 237 6.77 102 2.91 35 1 8 0.228    
ISO
ClASS 4
209E
Class 10
10000 285.7 2370 67.7 1020 29.1 352 10 83 2.37    
ISO
ClASS 5
209E
Class 100
100000 2857 23700 677 10200 291 3520 103 832 23.7 29 0.828
ISO
ClASS 6
209E
Class 1 000
1000000 28570 237000 6771 102000 2914 35200 1005 8320 237.7 293 8.37
ISO
ClASS 7
209E
Class
10 000
            352000 10057 83200 2377 2930 83.7
ISO
ClASS 8
209E
Class
100 000
            3520000 100571 832000 23771 29300 837
ISO
ClASS 9
209E
Class
1000 000
            35200000 1005714 8320000 237714 293000 8371
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