Top
Clean Room Introduction & Planning
Water and Power (Requirements)Planning Table
Process Cooling Water Ultra Pure Water Tap Water Drain
Pressure Flow Rate Water Temperature Pressure Flow Rate Resistance Pressure Flow Rate Acidic Drain Alkali Drain Ammonia Drain Organic Drain HF Waste Liquid General Drain
kg/cm2 l/min ℃ kg/cm2 l/min Ω kg/cm2 l/day l/min l/min l/min l/min l/min l/min
Power Requirement (KVA)
Three-phase Single-phase UPS AVR EMP
380V 220V 220V 110V
Clean Compressed Dry Air (CDA) Pressure kg/cm2 Vacuum Pump System (PV) Pressure mmHg
Without oil lpm Level lpm
Ar Pressure kg/cm2

PN2

 Pressure kg/cm2
Level l/min Level l/min
Clean Compressed Dry Air (CDA) Pressure kg/cm2 PH2 Pressure kg/cm2
Level l/min Level l/min

200 PPM SiH4/H2

 Pressure kg/cm2 HCL Pressure kg/cm2
Level SCCM Level l/min

NH3

 Pressure kg/cm2 10% GH2/GN2 Pressure kg/cm2
Level l/min Level l/min

Exhaust

 Acidic Drain CMM Organic Drain CMM Heat Drain CMM
Alkali Drain CMM General Drain CMM CMM CMM
Design By 元伸網頁設計
版權所有 © 2007-2014 鈦華科技股份有限公司 Module Clean Technology Co., Ltd. All Rights Reserved.